Focused Ion Beam Based Micromanipulation to Form Air Bridge Interconnect

Focused Ion Beam Lithography

Focused Ion Beam Based Three-Dimensional Nano-Machining

In recent days, the micro/nano machining becomes an important process to fabricate micro/nano scale dimensional patterns or devices for many applications, especially in electrical and electronic devices. There are two kinds micro-machining in use. i) bulk micromachining, ii) surface micro-maching. In the case of bulk micromaching, the structures can be made by etching inside a substrate selecti...

Focused Ion Beam Microscopy and Micromachining

The FIB Instrument The basic functions of the FIB, namely, imaging and sputtering with an ion beam, require a highly focused beam. A consistent tenet of any focused beam is that the smaller the effective source size, the more current that can be focused to a point. Unlike the broad ion beams generated from plasma sources, high-resolution ion beams are defined by the use of a field ionization so...

Sculpting on polymers using focused ion beam

Available online 13 June 2008 It has been recently shown t

Nanoimprint Mold Manufacturing with Focused Ion Beam

Nanoimprint lithography (NIL) is an emerging low cost technique for reproducing sub-45 nm pattern in various applications; however, manufacturing the mold for nanoimprint has been a key challenge in expense and resolution. Focused Ion Beams (FIB) has been known for high resolution but low throughput work in TEM sample preparation, and its extremely well defined 7 nm diameter Ga beam make it als...